Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators

Physics > Applied Physics [Submitted on 18 Jun 2026] Title:Determination of the intrinsic mechanical quality factor in high-stress silicon nitride resonators View PDF HTML (experimental)Abstract:Recent advances in silicon nitride nanomechanical resonators have pushed mechanical quality factors to ultra-high values by combining stress-induced dissipation dilution with mode-shape engineering. Neither mechanism alters the intrinsic quality factor $Q_{\mathrm{intr}}$. Targeting the intrinsic loss itself therefore remains an untapped route to even higher $Q$. Doing so first requires reliable quantification of $Q_{\mathrm{intr}}$, which has proven challenging. Here we present a robust methodology that quantifies $Q_{\mathrm{intr}}$ by combining automated mode identification with systematic ringdown measurements over a large number of mechanical modes. Applied to high-stress silicon nitride membranes, it reveals a systematic dependence of $Q_{\mathrm{intr}}$ on thickness that cannot be described using established models, particularly in the ultra-thin limit. We account for this trend with a phenomenological model that incorporates a thickness-dependent loss channel. Together, our method and model open a route toward a microscopic understanding of intrinsic dissipation and toward directly mitigating its loss channels. Current browse context: physics.app-ph Change to browse by: References & Citations Loading... Bibliographic and Citation Tools Bibliographic Explorer (What is the Explorer?) Connected Papers (What is Connected Papers?) Litmaps (What is Litmaps?) scite Smart Citations (What are Smart Citations?) Code, Data and Media Associated with this Article alphaXiv (What is alphaXiv?) CatalyzeX Code Finder for Papers (What is CatalyzeX?) DagsHub (What is DagsHub?) Gotit.pub (What is GotitPub?) Hugging Face (What is Huggingface?) ScienceCast (What is ScienceCast?) Demos Recommenders and Search Tools Influence Flower (What are Influence Flowers?) CORE Recommender (What is CORE?) arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs.